Accession Number : ADD016214
Title : Method for Making a Symmetrical Layered Thin Film Edge Field-Emitter-Array.
Descriptive Note : Patent, Filed 30 Nov 92, patented 30 Nov 93,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Gray, Henry F
Report Date : 30 Nov 1993
Pagination or Media Count : 10
Abstract : A field-emitter-array device includes a substrate supporting thin-film layers of conductive material and intervening thin-film layers of insulative material. The lateral edges of the thin-film layers form a field emitter array including a field-emitter edge electrode interposed between a pair of control electrodes. The control electrode edges produce a symmetric field causing the flow of field emitted electrons to be substantially parallel to the plane of the control and field-emitter edge electrodes. The direction of electron flow can be further controlled by additional electrodes in the form of additional thin-film conductive layers or external electrodes. A process for making the emitter device includes forming on a support member a plurality of planar first and second thin-film layers of insulative material alternately disposed between first, second and third thin-film layers of conductive material, forming a channel through the thickness of the layers and oriented perpendicular thereto, exposing the lateral edges of the layers of conductive and insulative materials adjacent to the channel to form a field emitter edge electrode interposed between a pair of control electrodes. Additional electrodes may be provided to form and deflect the electron flow.
Descriptors : *PATENTS, *FIELD EMISSION, *EMITTERS, *THIN FILMS, ARRAYS, CHANNELS, EDGES, ELECTRODES, ELECTRONS, LAYERS, MATERIAL FORMING, ELECTRICAL INSULATION, SILICON DIOXIDE, SUBSTRATES, THICKNESS, MANUFACTURING, LOW COSTS, MICROELECTRONICS, LITHOGRAPHY, SINGLE CRYSTALS, FABRICATION
Subject Categories : Electrical and Electronic Equipment
Electricity and Magnetism
Distribution Statement : APPROVED FOR PUBLIC RELEASE