Accession Number : ADD016221

Title :   Method of Forming Platinum and Platinum Silicide Schottky Contacts on Beta-Silicon Carbide.

Descriptive Note : Patent, Filed 28 Jul 92, patented 14 Dec 93,

Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s) : Papanicolaou, Nicolas A

Report Date : 14 Dec 1993

Pagination or Media Count : 5

Abstract : Platinum Schottky contacts remaining stable up to 800 deg C. have been produced. The adhesion of the platinum deposited at slightly elevated temperatures is good. Platinum provides a metallization that is physically rugged and thermally stable. The Schottky contacts are made on B-Silicon carbide.

Descriptors :   *PLATINUM, *SILICON CARBIDES, *PATENTS, *SILICIDES, *SCHOTTKY BARRIER DEVICES, *METAL CONTACTS, ADHESION, TEMPERATURE, METALLIZING

Subject Categories : Electrical and Electronic Equipment
      Metallurgy and Metallography
      Inorganic Chemistry

Distribution Statement : APPROVED FOR PUBLIC RELEASE