Accession Number : ADD016221
Title : Method of Forming Platinum and Platinum Silicide Schottky Contacts on Beta-Silicon Carbide.
Descriptive Note : Patent, Filed 28 Jul 92, patented 14 Dec 93,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Papanicolaou, Nicolas A
Report Date : 14 Dec 1993
Pagination or Media Count : 5
Abstract : Platinum Schottky contacts remaining stable up to 800 deg C. have been produced. The adhesion of the platinum deposited at slightly elevated temperatures is good. Platinum provides a metallization that is physically rugged and thermally stable. The Schottky contacts are made on B-Silicon carbide.
Descriptors : *PLATINUM, *SILICON CARBIDES, *PATENTS, *SILICIDES, *SCHOTTKY BARRIER DEVICES, *METAL CONTACTS, ADHESION, TEMPERATURE, METALLIZING
Subject Categories : Electrical and Electronic Equipment
Metallurgy and Metallography
Distribution Statement : APPROVED FOR PUBLIC RELEASE