Accession Number : ADD016350
Title : Formation of Superconducting BI-SR-CA-CU-O Films by Organometallic Chemical Vapor Deposition.
Descriptive Note : Patent, Filed 16 May 89, patented 24 May 94,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Berry, Alan D ; Gaskill, David K ; Holm, Ronald T ; Cukauskas, Edward J ; Kaplan, Raphael
Report Date : 24 May 1994
Pagination or Media Count : 12
Abstract : A CVD process for forming a layer or layers of superconducting materials on a semiconductor substrate in which volatile organometallic compounds of bismuth, strontium, calcium and copper are heated in the presence of a carrier gas in a first chamber free of hydrolyzing agents. Under conditions free of hydrolyzing agents, the carrier gas transports a predetermined quantity of the volatile organometallic compounds of the bismuth, strontium, calcium and copper to a deposition chamber. The compounds are decomposed and deposit mixed oxides on the substrate. Subsequent to deposition of the mixed oxides of the desired elements the layer is sintered in an oxygen-rich atmosphere, and formed into a superconducting film by subsequent slow cooling still in an oxygen-rich atmosphere.
Descriptors : *BISMUTH, *CALCIUM, *COPPER, *FILMS, *ORGANOMETALLIC COMPOUNDS, *OXIDES, *STRONTIUM, *PATENTS, *SUPERCONDUCTIVITY, *CHEMICAL VAPOR DEPOSITION, *THIN FILMS, ATMOSPHERES, CHAMBERS, COOLING, DEPOSITS, LAYERS, MATERIALS, OXYGEN, QUANTITY, SEMICONDUCTORS, SUBSTRATES, COMPOSITE MATERIALS, HEAT, GASES, RARE EARTH ELEMENTS
Subject Categories : Electricity and Magnetism
Solid State Physics
Distribution Statement : APPROVED FOR PUBLIC RELEASE