Accession Number : ADD016356
Title : Adhesion of Silicon Oxide to Diamond.
Descriptive Note : Patent Application, filed 22 Oct 93,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Marchywka, Michael J
Report Date : 22 Oct 1993
Pagination or Media Count : 16
Abstract : An electronic semiconductor device has a capability for storing a charge, is non-responsive to visible light and has a low leakage. The device is includes a diamond substrate which is securely adhered to a robust layer of silica layer that cannot be scratched by a tungsten probe or delaminated from the diamond substrate by pulling on a gold wire secured to the silica layer. This electronic device can be made by electrochemically cleaning the diamond substrate to remove non-diamond carbon adhering thereto, depositing a fragile layer of silica layer which weakly bonds to the cleaned diamond, and annealing the fragile silica layer to convert it into a strongly bonded and robust silicon dioxide layer.
Descriptors : *DIAMONDS, *SEMICONDUCTOR DEVICES, *SILICON DIOXIDE, *PATENT APPLICATIONS, *ADHESION, ANNEALING, CARBON, CLEANING, ELECTRONICS, GOLD, LAYERS, LIGHT, PROBES, SUBSTRATES, TUNGSTEN, WIRE, OXIDES, CHARGED PARTICLES, ELECTRONS, LEAKAGE(ELECTRICAL), ELECTROCHEMISTRY
Subject Categories : Inorganic Chemistry
Electrical and Electronic Equipment
Adhesives, Seals and Binders
Laminates and Composite Materials
Distribution Statement : APPROVED FOR PUBLIC RELEASE