Accession Number : ADD016377

Title :   Multilayer Microelectronic Photomultiplier Device with a Stacked Series of Dynode and Insulating Layers.

Descriptive Note : Patent, Filed 16 Feb 93, patented 26 Apr 94,

Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s) : Shimabukuro, Randy L ; Russell, Stephen D

Report Date : 26 Apr 1994

Pagination or Media Count : 15

Abstract : A multilayer microelectronic photomultiplier device is fabricated by discrete procedures to provide a photo-cathodeanode and dynode chain arrangement which is analogous in operation to conventional photomultiplier tubes. This multilayer microelectronic photomultiplier device provides for low level photon detection and realizes the advantages of high reliability, small size and fast response, plus lower cost, weight and power consumption compared to conventional photomultiplier tubes. In addition, the fabrication on an SOI substrate permits integration of logic and control circuitry with detectors. The insulating substrate also permits the integration of an on-chip high voltage supply and may easily be extended to a plurality of detectors with high packing densities due to the inherently stacked geometry offering improved performance and design flexibility.

Descriptors :   *MICROELECTRONICS, *PHOTOMULTIPLIER TUBES, *PATENTS, CHAINS, CONSUMPTION, CONTROL, COSTS, DENSITY, DETECTION, DETECTORS, DYNODES, FABRICATION, GEOMETRY, HIGH RELIABILITY, HIGH VOLTAGE, INTEGRATION, LOGIC, LOW LEVEL, OPERATION, PHOTONS, POWER, RELIABILITY, RESPONSE, SUBSTRATES, SUPPLIES, VOLTAGE, WEIGHT

Subject Categories : Electrical and Electronic Equipment

Distribution Statement : APPROVED FOR PUBLIC RELEASE