Accession Number : ADD016380

Title :   Volatile CVD Precursors Based on Copper Alkoxides and Mixed Group IIA-Copper Alkoxides.

Descriptive Note : Patent, Filed 10 Mar 93, patented 26 Apr 94,

Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s) : Purdy, Andrew

Report Date : 26 Apr 1994

Pagination or Media Count : 4

Abstract : This invention relates to novel chemical compositions for use in chemical vapor deposition. More specifically, it relates to fluorinated copper alkoxides and fluorinated calcium-copper, strontium-copper, and barium-copper alkoxides having superior physical properties for application in chemical vapor deposition to form thin films. The compounds should also be useful for the preparation of calcium, strontium, and barium-copper oxides by sol-gel processes

Descriptors :   *PATENTS, *CHEMICAL VAPOR DEPOSITION, *VOLATILITY, *PRECURSORS, *COPPER, *THIN FILMS, *ORGANIC SOLVENTS, *INORGANIC COMPOUNDS, CHEMICAL COMPOSITION, ALKYL RADICALS, OXIDES, FLUORINATION, CALCIUM, STRONTIUM, BARIUM, CHEMICAL COMPOSITION, REACTANTS(CHEMISTRY), GASES, CHEMICAL REACTORS, VAPOR PHASES, SUBSTRATES, ELECTRONIC EQUIPMENT, MANUFACTURING, HYDROLYSIS, HEAT TREATMENT, SOLIDS

Subject Categories : Physical Chemistry
      Inorganic Chemistry
      Organic Chemistry
      Solid State Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE