Accession Number : ADD016386

Title :   Method of Laser Processing Ferroelectric Materials.

Descriptive Note : Patent, Filed 3 Jun 91, patented 10 May 94,

Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s) : Russell, Stephen D ; Sexton, Douglas A

Report Date : 10 May 1994

Pagination or Media Count : 12

Abstract : Processing methods transform ferroelectric precursor films into a desired crystalline structure without adversely heating nearby materials and circuitry such as those found associated with lead zirconate titanate films. The thin film sample is placed within an appropriate chamber, where a suitable ambient is in contact with the thin film sample. The ambient may be air, oxygen or any other ambient which is known in the art to be appropriate for annealing ferroelectric materials. In this regard annealing in air can do without the processing chamber. The process for annealing relies upon continuous wave (CW) laser annealing, pulse UV annealing with or without a laser and various combinations of thermal pretreatment and processing to allow solid state diffusion in accordance with parameters appropriate for a particular application. Methods of laser patterning thin film ferroelectrics without adversely damaging adjacent or underlying layers, e.g. electrodes, are also disclosed

Descriptors :   *ANNEALING, *FERROELECTRIC MATERIALS, *THIN FILMS, *LASER APPLICATIONS, *PATENTS, CONTINUOUS WAVES, DIFFUSION, ELECTRODES, HEATING, LASERS, PROCESSING, PULSES, TITANATES, ZIRCONATES

Subject Categories : Electricity and Magnetism
      Lasers and Masers

Distribution Statement : APPROVED FOR PUBLIC RELEASE