Accession Number : ADD016407
Title : Laser Texturing.
Descriptive Note : Patent, Filed 27 Jul 92, patented 21 Jun 94,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Russell, Stephen D ; Sexton, Douglas A ; Kelley, Eugene P
Report Date : 21 Jun 1994
Pagination or Media Count : 11
Abstract : A non-contact method to impart a texture to a surface using laser irradiation uses an excimer laser to illuminate a sample immersed in a halocarbon ambient thereby initiating a photo/thermal chemical reaction which etches the sample only in the area illuminated with sufficient laser fluence. The resulting etched area can be repetively illuminated and etched to provide a textured surface to reduce extraneous reflections, or for micromachining, decorative texturing and marking. This technique is particularly well suited to improve the performance of backside illuminated CCDs by reducing the background (dark) signal, increase resolution and responsivity uniformity. The technique is compatible with other laser processing procedures and can be implemented with a variety of CCD enhancements such as improved dark current and blue response from laser doping or activation of backside implants. The noncorrosive nature of the halocarbon ambients allows the laser texturing process to be performed on pre-packaged, pre-tested devices and therefore can salvage parts which had failed performance specifications. This process therefore can improve device performance as well as yield, reliability and fabrication costs.
Descriptors : *CHARGE COUPLED DEVICES, *PRODUCTION ENGINEERING, *LASER APPLICATIONS, ACTIVATION, COSTS, DOPING, EXCIMERS, FABRICATION, IRRADIATION, PROCESSING, REFLECTION, RELIABILITY, RESOLUTION, SALVAGE, SIGNALS, SPECIFICATIONS, SURFACES, TEXTURE, PHOTOCHEMICAL REACTIONS, THERMOCHEMISTRY, QUALITY ASSURANCE, ETCHING, MICROELECTRONICS, PATENTS
Subject Categories : Mfg & Industrial Eng & Control of Product Sys
Electrical and Electronic Equipment
Industrial Chemistry and Chemical Processing
Lasers and Masers
Distribution Statement : APPROVED FOR PUBLIC RELEASE