Accession Number : ADD016525
Title : Method for Characterization of Optical Waveguide Devices Using Partial Coherence Interferometry.
Descriptive Note : Patent, Filed 15 Jan 91, patented 23 Aug 94,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : McLandrich, Matthew N ; Albares, Donald J ; Pappert, Stephen A
Report Date : 23 Aug 1994
Pagination or Media Count : 28
Abstract : An optical system and method include a short coherence length edge, emitting LED, a fiber optic coupler probe, and a Michelson interferometer to measure the parameter of thickness of optical devices, such as thin silicon substrate samples and to characterize other parameters of optical waveguide devices such as absolute attenuation, effective refractive index, and changes in these parameters with the application of a modulation voltage or an external disturbance. The measurable thickness range from a few to hundreds of microns with a thickness precision exceeding 0.1 micron for a 10 micron sample. In situ localized measurements of samples in an etching chamber are obtainable to control processing and provide for thickness uniformity.
Descriptors : *MICHELSON INTERFEROMETERS, *OPTICAL WAVEGUIDES, *PATENTS, ATTENUATION, CHAMBERS, COHERENCE, CONTROL, COUPLERS, EDGES, ETCHING, EXTERNAL, FIBER OPTICS, INDEXES, LENGTH, MEASUREMENT, MODULATION, PARAMETERS, PRECISION, PROBES, PROCESSING, REFRACTIVE INDEX, SILICON, SUBSTRATES, THICKNESS, VOLTAGE
Subject Categories : Optics
Distribution Statement : APPROVED FOR PUBLIC RELEASE