Accession Number : ADD016530

Title :   Method of Fabricating a Microelectronic Photomultiplier Device with Integrated Circuitry.

Descriptive Note : Patent, Filed 22 Nov 93, patented 12 Jul 94,

Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s) : Shimabukuro, Randy L ; Russell, Stephen D

Report Date : 12 Jul 1994

Pagination or Media Count : 12

Abstract : A microelectronic photomultiplier device is fabricated by discrete procedures to provide a photocathode-anode and dynode chain arrangement which is analogous in operation to conventional photomultiplier tubes. This microelectronic photomultiplier device provides for low level photon detection and realizes the advantages of high reliability, small size and fast response, plus lower cost, weight and power consumption compared to conventional photomultiplier tubes. In addition, the fabrication on an SOI substrate permits integration of logic and control circuitry with detectors. The insulating substrate also permits the integration of an on-chip high voltage supply and may easily be extended to a plurality of detectors offering improved performance and design flexibility.

Descriptors :   *FABRICATION, *MICROELECTRONICS, *PHOTOMULTIPLIER TUBES, *PHOTOCATHODES, *PATENTS, *INTEGRATED CIRCUITS, CHAINS, CONSUMPTION, CONTROL, COSTS, DETECTORS, DYNODES, HIGH RELIABILITY, HIGH VOLTAGE, INTEGRATION, LOGIC, LOW LEVEL, PHOTONS, POWER, RELIABILITY, RESPONSE, SUBSTRATES, SUPPLIES, VOLTAGE, INSULATION, ANODES, ELECTRODES, ELECTRONS

Subject Categories : Electrical and Electronic Equipment
      Nuclear Physics & Elementary Particle Physics
      Electricity and Magnetism

Distribution Statement : APPROVED FOR PUBLIC RELEASE