Accession Number : ADD016531
Title : Microdynamic Devices Fabricated on Silicon-On-Sapphire Substrates.
Descriptive Note : Patent, Filed 19 Aug 92, patented 19 Jul 94,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Sexton, Douglas A
Report Date : 19 Jul 1994
Pagination or Media Count : 5
Abstract : Silicon-on-sapphire substrates are provided for the fabrication of micromechanical devices, such as micromotors. The high voltage stand-off characteristics of silicon-on-sapphire thereby provides for the construction of superior electrostatically driven devices and sensors capable of being driven at significantly higher applied potentials since silicon-on-sapphire has demonstrated a capability for building in the range of hundreds of Angstroms, or thick, in the range of microns very high speed, low power, very densely packed integrated circuits using standard silicon processing techniques. As a consequence, the electrostatically driven devices, micromotors, can be incorporated in the integrated circuits and yet be powered at elevated voltages to increase their work potential.
Descriptors : *FABRICATION, *SAPPHIRE, *SILICON, *SUBSTRATES, *PATENTS, HIGH VOLTAGE, INTEGRATED CIRCUITS, LOW POWER, PROCESSING, STANDARDS, VELOCITY, VOLTAGE, MICROMECHANICS, ELECTROSTATICS, DETECTORS, DENSITY, STRUCTURES, SINGLE CRYSTALS, COMPOSITE MATERIALS, MICROMECHANICS, DYNAMICS, ELECTRONICS
Subject Categories : Electrical and Electronic Equipment
Laminates and Composite Materials
Electricity and Magnetism
Distribution Statement : APPROVED FOR PUBLIC RELEASE