Accession Number : ADD017724

Title :   Photon Controlled Decomposition of Nonhydrolyzable Ambients.

Descriptive Note : Patent, Filed 31 Mar 92, patented 19 Sep 95,

Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC

Personal Author(s) : Russell, Stephen D ; Sexton, Douglas A

Report Date : 19 Sep 1995

Pagination or Media Count : 8

Abstract : A method and apparatus to decompose nonhydrolyzable ambients such as chlorofluorocarbons and nitrogen trifluoride which enables the conventional disposal of their byproducts are disclosed. It employs photodecomposition of the nonhydrolyzable ambient using UV light and a mediating species to allow chemical reactions to occur which form an effluent which is hydrolyzed by conventional methods. This abatement process is amenable to point-of-use decomposition systems required for modular cluster tool systems used in microelectronic device fabrication. jg p.1

Descriptors :   *ULTRAVIOLET RADIATION, *PHOTONS, *HALOGENATED HYDROCARBONS, *DECOMPOSITION, *PATENTS, *PHOTODECOMPOSITION, CONTROL, TOOLS, LIGHT, FABRICATION, CLUSTERING, CHEMICAL REACTIONS, MICROELECTRONICS, CHLORIDES, DISPOSAL, HYDROLYSIS, FLUORIDES, NITROGEN COMPOUNDS

Subject Categories : Organic Chemistry
      Physical Chemistry
      Atomic and Molecular Physics and Spectroscopy
      Optics
      Nuclear Physics & Elementary Particle Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE