Accession Number : ADD017939
Title : Platinum and Platinum Silicide Contacts on beta-Silicon Carbide.
Descriptive Note : Patent, Filed 13 Dec 93, patented 28 Nov 95,
Corporate Author : DEPARTMENT OF THE NAVY WASHINGTON DC
Personal Author(s) : Papanicolaou, Nicolas A
Report Date : 28 Nov 1995
Pagination or Media Count : 5
Abstract : Gold, which is the commonly used metallization on beta-silicon carbide, is known to degrade at temperatures above 450 deg C. It also exhibits poor adhesion to silicon carbide. Schottky contacts with platinum metallization have rectifying characteristics similar to contacts with gold metallization. The platinum Schottky contacts remain stable up to 800 deg C. Adhesion of the platinum deposited at slightly elevated temperatures is also superior to that for gold. Platinum provides a metallization that is physically more rugged and thermally more stable than conventional gold metallization.
Descriptors : *PLATINUM, *SCHOTTKY BARRIER DEVICES, *SILICON CARBIDES, *SILICIDES, *PATENTS, HIGH TEMPERATURE, ADHESION, THERMAL STABILITY, GOLD, METALLIZING
Subject Categories : Inorganic Chemistry
Electrical and Electronic Equipment
Distribution Statement : APPROVED FOR PUBLIC RELEASE