Accession Number : ADP001510

Title :   DC Plasma Anodization of Quartz Resonators,

Corporate Author : MOTOROLA INC PHOENIX ARIZ

Personal Author(s) : Shanley,C. W. ; Dworsky,L. N.

Report Date : 1982

Pagination or Media Count : 8

Abstract : A technique for final tuning AT-quartz resonators having aluminum electrodes by means of a low energy DC oxygen plasma is described. Compared to other techniques, this method is clean, dry, protective, selective, and does not significantly heat the crystal. In this process a small volume of oxygen plasma is generated in a plasma 'gun' by a DC potential. A positive bias on the crystal electrode placed near the plasma causes the electrode to be anodized. The oxide layer increases the mass of the electrode and thereby lowers it frequency. Unbiased electrodes are not effected by the process, so monolithic filters may be tuned. (Author)

Descriptors :   *Frequency, *Control, *Symposia, *Quartz resonators, *Plasmas(Physics), Tuning, Aluminum, Electrodes, Methodology, Crystals, Dry materials

Distribution Statement : APPROVED FOR PUBLIC RELEASE