Accession Number : ADP001556

Title :   Effects of RIE Tuning on the Electrical and Temperature Characteristics of Quartz SAW Resonators,


Personal Author(s) : Kotecki,Carl

Report Date : 1982

Pagination or Media Count : 11

Abstract : In recent years, Surface Acoustic Wave Resonators have been developed to the point of being useful in oscillator circuits used in the VHF and UHF ranges. The advantages of operating an oscillator at final frequency, as opposed to using a low frequency bulk crystal with multiplier circuits, are well known. If it is desired to cover an entire band with custom frequency sources, a multitude of masks (since each mask produces a single frequency resonator) or an effective tuning procedure is required. To minimize the number of masks required, the tuning procedure should have a wide tuning range with minimal effect on the other characteristics of the device. Reactive Ion Etching of the quartz meets these criteria. (Author)

Descriptors :   *Frequency, *Control, *Symposia, *Quartz resonators, *Surface acoustic waves, Tuning, Electrical properties, Temperature, Oscillators, Electric conductors, Ultrahigh frequency

Distribution Statement : APPROVED FOR PUBLIC RELEASE