Accession Number : ADP001557

Title :   Frequency Fine Tuning of Reliable SAW Transducers Using Anodization Technique,

Corporate Author : MOTOROLA INC SCOTTSDALE AZ GOVERNMENT ELECTRONICS GROUP

Personal Author(s) : Cho,F. Y. ; Chatham,T. B. ; Leon,R. Ponce de

Report Date : 1982

Pagination or Media Count : 11

Abstract : The anodization process used to fine tune bulk resonator and filters has been reported by different authors. In this study the use of RF oxygen plasma has proved to be very effective in the fine tuning of narrow band SAW devices and increased resistance from corrosion caused by chemical reactions. Aging characteristics are improved due to the protection of the anodized layer which is formed on an aluminum transducer when the Rf oxygen plasma combines with it and forms a layer of aluminum oxide. Experiments were conducted by controlling the operation parameters of the RF oxygen plasma, including various anodization duration, with a given oxygen gas pressure and RF power.

Descriptors :   *Frequency, *Control, *Symposia, *Surface acoustic waves, *Transducers, Tuning, Reliability, Anodes, Radiofrequency, Plasmas(Physics), Oxygen

Distribution Statement : APPROVED FOR PUBLIC RELEASE