Accession Number : ADP002509
Title : Surface Wave Resonators on Silicon,
Corporate Author : PURDUE UNIV LAFAYETTE IN SCHOOL OF ELECTRICAL ENGINEERING
Personal Author(s) : Martin,S. J. ; Gunshor,R. L. ; Miller,T. J. ; Datta,S. ; Pierret,R. F.
Report Date : 1983
Pagination or Media Count : 5
Abstract : In this paper two topics new to the ZnO-on-Si resonator development are discussed: The use of SAW resonators to determine the effect of a laser anneal on layered medium propagation loss; and A conceptually new device, called the mode conversion resonator, which utilizes two propagating normal modes of the layered medium in order to gain enhanced out-of-band signal rejection.
Descriptors : *Acoustic resonators, *Surface waves, *Silicon, Substrates, Fabrication, Zinc oxides, Piezoelectric materials, Lasers, Annealing
Distribution Statement : APPROVED FOR PUBLIC RELEASE