Accession Number : ADP002588
Title : Diamond Like Carbon Films Research at NASA Lewis Research Center,
Corporate Author : NATIONAL AERONAUTICS AND SPACE ADMINISTRATION CLEVELAND OH LEWIS RESEARCH CENTER
Personal Author(s) : Banks,B. A.
Report Date : 1982
Pagination or Media Count : 20
Abstract : Interest in diamond-like films at NASA Lewis Research Center has been based on potential applications that might advantageously utilize the electrical, optical, thermal, mechanical, or chemical properties of these films. Over the past two years a focussed effort has been established at NASA Lewis to investigate the feasibility of using such films for power electronics devices such as heat conductor for semiconductors or as doped semiconductors themselves. If the diamond like films exhibit high thermal conductivities then applications as a heat spreader to cool semiconductor junctions may be attractive. Doping of diamond-like films as an integral part of a vacuum deposition process may enable cost effective production of a new class of semiconductors. The realization of practical application of diamond-like films will be in part dependent upon the ability to reliably and economically produce diamond-like films having satisfactory characteristics.
Descriptors : *Coatings, *Carbon, *Symposia, *Optical coatings, Films, Production, Deposition, Vacuum deposition, Vapors, Ion beams, Doping
Distribution Statement : APPROVED FOR PUBLIC RELEASE