Accession Number : ADP002599

Title :   Raman Scattering as a Probe of Thin-Films,

Corporate Author : MASSACHUSETTS INST OF TECH LEXINGTON LINCOLN LAB

Personal Author(s) : Brueck,S. R. J.

Report Date : 1982

Pagination or Media Count : 10

Abstract : Raman scattering provides a nondestructive probe of thin-film properties such as local structure, degree of crystallinity, microcrystal grain size and local strain fields. We have carried out a series of measurements on Si films with thicknesses as small as 20 A and with a transverse spatial resolution of about 0.5 micrometers. Applications to the characterization of diamond-like carbon films will be discussed.

Descriptors :   *Coatings, *Carbon, *Symposia, *Optical coatings, *Thin films, Raman spectroscopy, Crystal structure, Thickness, Measurement

Distribution Statement : APPROVED FOR PUBLIC RELEASE