Accession Number : ADP002599
Title : Raman Scattering as a Probe of Thin-Films,
Corporate Author : MASSACHUSETTS INST OF TECH LEXINGTON LINCOLN LAB
Personal Author(s) : Brueck,S. R. J.
Report Date : 1982
Pagination or Media Count : 10
Abstract : Raman scattering provides a nondestructive probe of thin-film properties such as local structure, degree of crystallinity, microcrystal grain size and local strain fields. We have carried out a series of measurements on Si films with thicknesses as small as 20 A and with a transverse spatial resolution of about 0.5 micrometers. Applications to the characterization of diamond-like carbon films will be discussed.
Descriptors : *Coatings, *Carbon, *Symposia, *Optical coatings, *Thin films, Raman spectroscopy, Crystal structure, Thickness, Measurement
Distribution Statement : APPROVED FOR PUBLIC RELEASE