Accession Number : ADP002600
Title : Microstructure-Property Relations in Sputtered Films,
Corporate Author : PENNSYLVANIA STATE UNIV UNIVERSITY PARK MATERIALS RESEARCH LAB
Personal Author(s) : Messier,R.
Report Date : 1982
Pagination or Media Count : 19
Abstract : The mechanical and chemical properties of thin films depend at least in part on their microstructure. A structure zone model common to all vapor deposition methods has been developed to classify the various physical microstructures found.
Descriptors : *Coatings, *Carbon, *Symposia, *Optical coatings, *Thin films, Microstructure, Chemical properties, Mechanical properties, Mathematical models
Distribution Statement : APPROVED FOR PUBLIC RELEASE