Accession Number : ADP003949
Title : Characteristics of Ion Implanters for Fabrication of Electronic Devices,
Corporate Author : ARMY ELECTRONICS RESEARCH AND DEVELOPMENT COMMAND FORT MONMOUTH NJ ELECTRONICS TECHNOLOGY/DEVICES LAB
Personal Author(s) : Mark,A.
Report Date : JUN 1984
Pagination or Media Count : 11
Abstract : This paper concerns the characteristics of ion implanters for fabrication of electronic devices. High voltage implanters have been designed for implanting ions deeper into semiconductor materials. They are now standardized at 400 keV.
Descriptors : *Ion implantation, Fabrication, Electronic equipment, High voltage, Semiconductors, Workshops
Distribution Statement : APPROVED FOR PUBLIC RELEASE