Accession Number : ADP005965

Title :   Microelectronics the Next Fifteen Years,

Corporate Author : NAVAL WEAPONS CENTER CHINA LAKE CA

Personal Author(s) : Wallace, Dean

Report Date : DEC 1987

Pagination or Media Count : 5

Abstract : This paper attempts to predict some future trends in microelectronics. The paper focuses on CMOS integrated circuit technology. CMOS is presently the leading integrated circuit technology, and all trends show that it will continue to dominate the integrated circuit market in the future. I examine the processing of what I feel will be the two leading CMOS technologies of the future, twin tub, and silicon on insulator (SOI). These two technologies have the capability of giving maximum CMOS device performance. With device geometries shrinking the problems associated with scaling are introduced, and some possible solutions are examined. The paper is concluded with a brief description of some fundamental limits in integrated circuit technology. NATO Furnished. (RH)

Descriptors :   *INTEGRATED CIRCUITS, *MICROELECTRONICS, *SILICON COATINGS, ELECTRICAL INSULATION, MARKETING, PATTERNS, TOUCH.

Subject Categories : Electrical and Electronic Equipment
      Solid State Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE