Accession Number : ADP006638
Title : Ferroelectric Memory Programs in Canada,
Corporate Author : QUEEN'S UNIV KINGSTON (ONTARIO) DEPT OF PHYSICS
Personal Author(s) : Sayer, Michael
Report Date : 05 APR 1991
Pagination or Media Count : 9
Abstract : Thin film PZT ferroelectrics have been fabricated in Canada since 1976 by magnetron sputtering and more recently by acetate-based sol gel processing and are now being considered for implementation into commercial communications systems. Processing based on rapid thermal annealing has shown marked advantages for crystallization into the required perovskite phase. Applications based on the piezoelectric properties of PZT films are shown to have an interesting potential for a range of devices.
Descriptors : *FERROELECTRIC MATERIALS, *MEMORY DEVICES, *FABRICATION, ACETATES, ANNEALING, CANADA, COMMERCIAL COMMUNICATIONS, CRYSTALLIZATION, GELS, MAGNETRONS, PEROVSKITES, PROCESSING, SPUTTERING, THIN FILMS, LEAD TITANATES, ZIRCONATES.
Subject Categories : Electricity and Magnetism
Electrical and Electronic Equipment
Ceramics, Refractories and Glass
Mfg & Industrial Eng & Control of Product Sys
Distribution Statement : APPROVED FOR PUBLIC RELEASE