Accession Number : ADP006646
Title : Pulsed Excimer Laser Deposition of Ferroelectric Thin Films,
Corporate Author : PENNSYLVANIA STATE UNIV UNIVERSITY PARK MATERIALS RESEARCH LAB
Personal Author(s) : Krupanidhi, S. B. ; Roy, D. ; Maffei, N. ; Peng, C. J.
Report Date : 05 APR 1991
Pagination or Media Count : 16
Abstract : Pulsed UV excimer laser ablation was employed to deposit multi-axial, bi-axial and uni-axial ferroelectric compositions of PZT, bismuth titanate and lead germanate respectively. In general, a fluence lower than 2 J/cm2 caused a preferential evaporation of volatile components, resulting in stoichiometric imbalance. However, the fluences beyond 2 J/cm2 enabled the deposition of stoichiometric thin films of multi-component oxide systems. The intrinsic bombardment due to the energetic ablated species during the thin film deposition seemed to influence the composition, structure, orientation and the electrical properties. The electrical characterization of ferroelectric films indicated a dielectric constant of 800-1000, a P, of 32 micron C/cm2 and E sub c of 130KV/cm for polycrystalline PZT films and the corresponding quantities were measured to be 150, 7 micron C/cm2 and 20 KV/cm for in-situ crystallized c-axis preferred oriented bismuth titanate films. Lead germanate thin films oriented along c-axis (OO3) showed a dielectric constant of 30, a P sub r of 2.5 micron C/cm2 and E sub c of 55 KV/cm.
Descriptors : *BISMUTH TITANATE, *DEPOSITION, ABLATION, CONSTANTS, DIELECTRICS, ELECTRICAL PROPERTIES, EVAPORATION, EXCIMERS, GERMANATES, OXIDES, POLYCRYSTALLINE, QUANTITY, STRUCTURES, THIN FILMS, LASER APPLICATIONS, LEAD TITANATES, ZIRCONATES.
Subject Categories : Ceramics, Refractories and Glass
Mfg & Industrial Eng & Control of Product Sys
Distribution Statement : APPROVED FOR PUBLIC RELEASE