Accession Number : ADP006656

Title :   SOL-GEL Derived Ferroelectric Thin Films in Silicon Micromachining,

Corporate Author : MINNESOTA UNIV MINNEAPOLIS DEPT OF ELECTRICAL ENGINEERING

Personal Author(s) : Hsueh, C. C. ; Tamagawa, T. ; Ye, C. ; Helgeson, A.

Report Date : 05 APR 1991

Pagination or Media Count : 14

Abstract : Ferroelectric thin films have been integrated with silicon micromechanical structures in the fabrication of microsensor and microactuator structures. Both the piezoelectric and pyroelectric effects in thin films of lead zirconate titanate (Pb(ZrxTil-x)03) and lead titanate (PbTiO3) have been used for physical force sensing (pressure sensor), thermal heat sensing (pyroelectric infrared detector), and microactuation (mechanical positioner). Solid-state micromachining is used to form mechanical membranes on a silicon wafer for implementing easily deformable membranes of structures with a low thermal mass. This paper demonstrates the compatible simultaneous integration of 1) sol-gel deposited ferroelectric thin films, 2) surface-machined micromechanical structures, and 3) n-well CMOS integrated circuit technologies.

Descriptors :   *INTEGRATED CIRCUITS, *MICROCIRCUITS, *ACTUATORS, *FERROELECTRIC MATERIALS, FABRICATION, HEAT, INTEGRATION, MEMBRANES, SILICON, SOLIDS, STRUCTURES, SURFACES, THIN FILMS, WAFERS, ZIRCONATES, LEAD TITANATES, PYROELECTRICITY, INFRARED DETECTORS.

Subject Categories : Electricity and Magnetism
      Ceramics, Refractories and Glass

Distribution Statement : APPROVED FOR PUBLIC RELEASE