Accession Number : ADP006660
Title : Study of the Optical Properties of RF Sputtered Lithium Niobate Thin Films,
Corporate Author : RICE UNIV HOUSTON TX DEPT OF ELECTRICAL AND COMPUTER ENGINEERING
Personal Author(s) : Huang, Charles Hung-Jia ; Rabson, Thomas A.
Report Date : 05 APR 1991
Pagination or Media Count : 10
Abstract : Lithium niobate optical waveguides were fabricated on (110), and (100) sapphire by both diode and magnetron rf sputtering at 500-600 deg C in a flowing Ar/02 Atmosphere. Light coupling utilizing a rutile prism coupler was demonstrated. The propagation losses were obtained by measuring the scattered light from the surface using a fiber probe. The mode angles were also measured and used to calculate the thickness and the refractive indices of each sample. X-ray diffraction studies and the birefringence observed in the films have confirmed the crystalline nature the films. The lowest value of attenuation of the He-Ne laser light propagating in the lithium niobate waveguide sputtered on sapphire was determined to-be 1.1 +/- 0.1 dB/cm. In addition, the lowest attenuation in lithium niobate thin film waveguides sputtered on SiO2/Si substrates was measured to be 2.3 dB/cm using end-fire coupling and fiber probing techniques.
Descriptors : *OPTICAL WAVEGUIDES, *SPUTTERING, ANGLES, ATMOSPHERES, ATTENUATION, BIREFRINGENCE, COUPLERS, COUPLINGS, DIFFRACTION, DIODES, FIBERS, FILMS, LASERS, LIGHT, LITHIUM NIOBATES, LOSSES, MAGNETRONS, PROBES, PROPAGATION, RUTILE, SAPPHIRE, SUBSTRATES, SURFACES, THICKNESS, THIN FILMS, X RAY DIFFRACTION.
Subject Categories : Electricity and Magnetism
Ceramics, Refractories and Glass
Mfg & Industrial Eng & Control of Product Sys
Distribution Statement : APPROVED FOR PUBLIC RELEASE