Accession Number : ADP006675

Title :   Crack-Free PZT Thin Films Micropatterned on Silicon Substrate for Integrated Circuits,

Corporate Author : OSAKA UNIV (JAPAN)

Personal Author(s) : Toyama, Motoo ; Inoue, Naoto ; Okuyama, Masanori

Report Date : 05 APR 1991

Pagination or Media Count : 9

Abstract : Process for getting crack-free lead zirconate titanate (PZT) thin films micropatterned on Si substrate is demonstrated. The PZT film was deposited at temperatures below 30 deg C by magnetron sputtering using a ceramic target, and then etched before annealing. After annealed above 500 deg C to get perovskite phase, the PZT films shows no crack, while PZT films, not patterned, has cracks. This result can be explained as dissipation of stress energy by reduction of the lateral size of the film. The effects of processing parameters of reactive sputtering and annealing on the morphology of the PZT thin films are presented. Photo-assist etching of the PZT thin films using KrF laser is described, too.

Descriptors :   *THIN FILMS, *STRESS RELIEVING, *LEAD TITANATES, *FERROELECTRIC MATERIALS, ANNEALING, CRACKS, DISSIPATION, ENERGY, ETCHING, MAGNETRONS, MORPHOLOGY, PARAMETERS, PEROVSKITES, PHASE, PROCESSING, REDUCTION, SPUTTERING, SUBSTRATES, TEMPERATURE, ZIRCONATES, JAPAN.

Subject Categories : Ceramics, Refractories and Glass

Distribution Statement : APPROVED FOR PUBLIC RELEASE