Accession Number : ADP006684
Title : Statistical Investigation of SOL-GEL Lead Titanate (PT) Processing,
Corporate Author : COLORADO UNIV AT COLORADO SPRINGS
Personal Author(s) : Melnick, B. M. ; Gallegos, R. ; Paz De Araujo, C. A.
Report Date : 05 APR 1991
Pagination or Media Count : 14
Abstract : There are three stages involved in the successful application of a thin film sol-gel oxide, (1) solution synthesis, (2) application, and (3) post application treatments. Each stage contains many processing steps that can be varied in order to optimize the thin film for various applications. This work entails a statistical investigation of a thin film sol-gel PT process for use in memory applications. Statistical experimental design yields a maximum amount of information for a minimum amount of effort. Candidate controllable variables (factors) and responses are first identified. A screening experiment is then conducted to identify the most important factors based on the identified responses. A full-factorial experiment is then conducted to further evaluate the important factors. Finally, a response surface analysis is performed in order to optimize the important factors. Responses such as switching charge (2Pr), endurance and dielectric measurements are used to analyze the sol-gel lead titanate.
Descriptors : *LEAD TITANATES, *THIN FILMS, *DEPOSITION, COMBINATORIAL ANALYSIS, DIELECTRICS, EXPERIMENTAL DESIGN, GELS, MEASUREMENT, PROCESSING, RESPONSE, SURFACE ANALYSIS, SWITCHING, FERROELECTRIC MATERIALS.
Subject Categories : Mfg & Industrial Eng & Control of Product Sys
Electricity and Magnetism
Distribution Statement : APPROVED FOR PUBLIC RELEASE