Accession Number : ADP006686
Title : Chemical Aspects of Pb-Zr-Ti Oxide Thin Film Synthesis by PE-MOCVD Below 500c,
Corporate Author : ARIZONA STATE UNIV TEMPE DEPT OF CHEMISTRY
Personal Author(s) : Petuskey, William T. ; Richardson, David A.
Report Date : 05 APR 1991
Pagination or Media Count : 27
Abstract : The general features of the chemistry in synthesizing lead zirconium titanate thin films by PE-MOCVD are discussed based on a preliminary experimental investigation. A qualitative model was constructed as a guide for optimizing the formation of the perovskite phase in the as-deposited condition. This was based on concepts of crystal chemistry of the perovskite and pyrochlore structures and the observed deposition kinetics. Currently, thin films containing up to 92 vol % perovskite have been formed below 500 deg C in the as-deposited condition. Sufficient latitude remains in adjusting the operating parameters that the formation of phase pure perovskite is considered possible. A thermodynamic analysis of the solid state suggests that low temperature thermal equilibration will yield minority lead-rich phases. Consequently, nonequilibrium processing techniques such as plasma processing are considered necessary. Ferroelectric hysteresis was observed for films receiving post deposition anneals.
Descriptors : *CRYSTAL CHEMISTRY, *LEAD TITANATES, *SYNTHESIS(CHEMISTRY), CRYSTALS, DEPOSITION, HYSTERESIS, KINETICS, LATITUDE, LOW TEMPERATURE, PEROVSKITES, PHASE, PROCESSING, SOLIDS, STRUCTURES, TEMPERATURE, THERMODYNAMICS, THIN FILMS, YIELD, ZIRCONATES.
Subject Categories : Industrial Chemistry and Chemical Processing
Ceramics, Refractories and Glass
Distribution Statement : APPROVED FOR PUBLIC RELEASE