Accession Number : ADP007068

Title :   High Performance Multilayer X-Ray Optics,

Corporate Author : LAWRENCE LIVERMORE NATIONAL LAB CA

Personal Author(s) : Stearns, D. G. ; Rosen, R. S. ; Vernon, S. P.

Report Date : 22 MAY 1992

Pagination or Media Count : 8

Abstract : We review the state-of-the-art in multilayer (ML) coatings for high normal incidence reflectivity at soft x-ray wavelengths. In particular, molybdenum-silicon ML and RU-boron carbide ML grown by magnetron sputtering have demonstrated normal incidence reflectivities as high as 64% at 130 A and 20% at 70 A respectively. A strong dependence of the Mo-Si layer morphology on the sputtering gas pressure is observed, and is directly correlated with the normal incidence x-ray reflectivity. We consider issues relevant to the deposition of multilayers on figured imaging optics, and describe recent measurements of the normal incidence reflectivity of spherical substrates coated with Mo-Si ML.

Descriptors :   *OPTICAL COATINGS, *SOFT X RAYS, *COHERENT OPTICAL RADIATION, *REFLECTIVITY, SHORT WAVELENGTHS, BORON CARBIDES, COHERENT RADIATION, SPUTTERING, OPTICAL IMAGES, SYMPOSIA.

Subject Categories : Coatings, Colorants and Finishes
      Optics
      Nuclear Physics & Elementary Particle Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE