Accession Number : ADP007226

Title :   High-Resolution Soft-X-Ray Projection Imaging,

Corporate Author : AT AND T BELL LABS HOLMDEL NJ

Personal Author(s) : Wood, O. R., II ; Bjorkholm, J. E. ; Bokor, J. ; Eichner, L. ; Freeman, R. R.

Report Date : 22 MAY 1992

Pagination or Media Count : 3

Abstract : The principal motivation for carrying out projection imaging with soft-x-rays instead of with visible or ultraviolet light lies in the dramatic improvement in resolution that can be obtained (while maintaining a usable depth of focus). Although there are many reports of soft-x-ray imaging in the literature , soft-x ray imaging with truly high resolution has only recently been demonstrate. In this talk we describe the results of several experiments which have demonstrated projection imaging in the soft-x-ray spectral region with a resolution approaching the Rayleigh limit.

Descriptors :   *LITHOGRAPHY, X RAYS, FOCUSING, PROJECTION PRINTERS, SHORT WAVELENGTHS.

Subject Categories : Printing and Graphic Arts

Distribution Statement : APPROVED FOR PUBLIC RELEASE