Accession Number : ADP007227

Title :   Soft-X-Ray Projection Lithography System Design,

Corporate Author : LAWRENCE LIVERMORE NATIONAL LAB CA

Personal Author(s) : Ceglio, N. M. ; Hawryluk, A. M.

Report Date : 22 MAY 1992

Pagination or Media Count : 6

Abstract : A baseline design for a Soft X-Ray Projection Lithography (SXPL) system is presented. This design is intended to serve as a starting point, and provide an overview of the likely form and structure of a SXPL prototype. Technical performance specifications for system components are presented along with analyses supporting the specification choices.

Descriptors :   *LITHOGRAPHY, SHORT WAVELENGTHS, SOFT X RAYS, PROTOTYPES.

Subject Categories : Photography

Distribution Statement : APPROVED FOR PUBLIC RELEASE