Accession Number : ADP007234

Title :   Specifying Optical Fabrication Tolerances for Soft-X-Ray Projection Lithography,

Corporate Author : UNIVERSITY OF CENTRAL FLORIDA ORLANDO CENTER FOR RESEARCH IN ELECTRO-OPTICS A ND LASERS

Personal Author(s) : Harvey, James E.

Report Date : 22 MAY 1992

Pagination or Media Count : 3

Abstract : The rapidly emerging technology of soft X-ray projection microlithography requires very stringent tolerances upon the residual surface errors inherent with any optical fabrication process. The scattering effects of these optical fabrication errors can severely degrade system performance. These optical fabrication errors must therefore be controlled over the entire range of relevant spatial frequencies, including mid spatial frequency surface irregularities that bridge the gap between the traditional 'figure' and 'finish' errors. The surface power spectral density (PSD) function thus becomes the natural quantity to monitor during the optical fabrication process.

Descriptors :   *LITHOGRAPHY, SOFT X RAYS, TOLERANCE, OPTICAL PROPERTIES.

Subject Categories : Photography

Distribution Statement : APPROVED FOR PUBLIC RELEASE