Accession Number : ADP007239
Title : Soft-X-Ray Projection Imaging Using a Laser Plasma Source,
Corporate Author : SANDIA NATIONAL LABS ALBUQUERQUE NM
Personal Author(s) : Tichenor, D. A. ; Kubiak, G. D. ; Malinowski, M. E. ; Stulen, R. H. ; Haney, S. J.
Report Date : 22 MAY 1992
Pagination or Media Count : 4
Abstract : The feasibility of producing small feature sizes in resists using soft x-ray projection lithography has been demonstrated. Experiments by AT and T Bell Laboratories have achieved features small as 0.05 microns using a Schwarzschild objective and 140 angstrom radiation from an undulator at the National Synchrotron Light Source. We describe here a similar imaging system in which the illumination is derived from a high-fluence laser plasma source (LPS) of soft x-rays instead of a synchrotron radiation source. The laser plasma source has been shown to be a useful illumination source for soft x-ray microscopy.
Descriptors : *LITHOGRAPHY, X RAYS, IMAGE PROJECTORS, OPTICAL IMAGES.
Subject Categories : Photography
Distribution Statement : APPROVED FOR PUBLIC RELEASE