Accession Number : ADP007239

Title :   Soft-X-Ray Projection Imaging Using a Laser Plasma Source,

Corporate Author : SANDIA NATIONAL LABS ALBUQUERQUE NM

Personal Author(s) : Tichenor, D. A. ; Kubiak, G. D. ; Malinowski, M. E. ; Stulen, R. H. ; Haney, S. J.

Report Date : 22 MAY 1992

Pagination or Media Count : 4

Abstract : The feasibility of producing small feature sizes in resists using soft x-ray projection lithography has been demonstrated. Experiments by AT and T Bell Laboratories have achieved features small as 0.05 microns using a Schwarzschild objective and 140 angstrom radiation from an undulator at the National Synchrotron Light Source. We describe here a similar imaging system in which the illumination is derived from a high-fluence laser plasma source (LPS) of soft x-rays instead of a synchrotron radiation source. The laser plasma source has been shown to be a useful illumination source for soft x-ray microscopy.

Descriptors :   *LITHOGRAPHY, X RAYS, IMAGE PROJECTORS, OPTICAL IMAGES.

Subject Categories : Photography

Distribution Statement : APPROVED FOR PUBLIC RELEASE