Accession Number : ADP007243
Title : Laser-Produced Plasma Soft-X-Ray Generation,
Corporate Author : LAWRENCE LIVERMORE NATIONAL LAB CA
Personal Author(s) : Cerjan, C. ; Rosen, M. D.
Report Date : 22 MAY 1992
Pagination or Media Count : 4
Abstract : The efficiency of soft x-ray production from laser-irradiated plasmas is simulated for two different spectral regions. These two regions, 14A +/- 15% and 130A-, 1 %, were chosen for proximity mask or point projection technological applications. Relatively large conversion efficiencies were obtained from irradiation of a stainless steel target using the conditions suggested by recent Hampshire Instruments' experiments for proximity masking. Pulse-width and laser frequency parameter studies were performed for point-projection applications which suggest that the conversion efficiency is sensitive to pulse-width but not to laser frequency.
Descriptors : *SOFT X RAYS, *TARGETS, *LITHOGRAPHY, CONVERSION, EFFICIENCY, FREQUENCY, IRRADIATION, LASERS, MASKING, MASKS, PARAMETERS, PRODUCTION, PULSES, REGIONS, STAINLESS STEEL, STEEL, WIDTH, X RAYS.
Subject Categories : Photography
Distribution Statement : APPROVED FOR PUBLIC RELEASE