Accession Number : ADP007246

Title :   Multilayers for Soft-X-Ray Optics,

Corporate Author : TOHOKU UNIV SENDAI (JAPAN)

Personal Author(s) : Namioka, Takeshi ; Yamamoto, Masaki ; Yanagihara, Mihiro ; Koike, Masato

Report Date : 22 MAY 1992

Pagination or Media Count : 5

Abstract : Some problems fundamental to the design of soft-x-ray (SXR) multilayers are discussed. This includes an optical criterion for selecting proper material pairs and the critical film thickness needed for a film to become optically isotropic. A laboratory-type spectroreflectometer useful for the evaluation of SXR multilayers is presented with experimental results. For practical interest in SXR projection lithography, preliminary results are also presented on irradiation tests of SXR multilayers and design of a demagnifying Schwarzschild optics for use with synchrotron radiation.

Descriptors :   *LITHOGRAPHY, FILMS, IRRADIATION, LABORATORIES, MATERIALS, OPTICS, RADIATION, SYNCHROTRON RADIATION, SYNCHROTRONS, TEST AND EVALUATION, THICKNESS.

Subject Categories : Photography

Distribution Statement : APPROVED FOR PUBLIC RELEASE