Accession Number : ADP007247

Title :   Multilayer Uniformity and Performance of Soft-X-Ray Imaging Optics,

Corporate Author : CALIFORNIA UNIV BERKELEY LAWRENCE BERKELEY LAB

Personal Author(s) : Kortright, J. B. ; Watts, R. N.

Report Date : 22 MAY 1992

Pagination or Media Count : 5

Abstract : A Schwarzschild objective coated with Mo/Si multilayers is used as an example to discuss issues of multilayer uniformity on soft x-ray reflective optics for imaging applications. Ray-tracing dictates the ideal multilayer period variation across the curved surfaces of these optics. Deposition system dependent factors are used to predict the expected variation. Measurements yield the actual variation obtained in practice. The multilayer bandwidth sets the tolerance scale for acceptable deviations from the ideal period variation. For Mo/Si multilayers for use at lamda > 124 angstrom this bandwidth is relatively large, easing the tolerance for period variation control. At shorter wavelengths, high reflectance multilayer bandwidths are narrower, requiring more effort to obtain acceptable period variation.

Descriptors :   *SOFT X RAYS, BANDWIDTH, CONTROL, DEPOSITION, MEASUREMENT, OPTICS, RAY TRACING, REFLECTANCE, SCALE, SURFACES, TOLERANCE, VARIATIONS, X RAYS, YIELD, LITHOGRAPHY.

Subject Categories : Photography

Distribution Statement : APPROVED FOR PUBLIC RELEASE