Accession Number : ADP007248

Title :   Achieving Uniform Multilayer Coatings on Figured Optics,

Corporate Author : AT AND T BELL LABS MURRAY HILL NJ

Personal Author(s) : Waskiewicz, W. K. ; Windt, D. L. ; Bjorkholm, J. E. ; Eichner, L. ; Freeman, R. R

Report Date : 22 MAY 1992

Pagination or Media Count : 4

Abstract : We discuss design considerations for high-reflectance multilayer coatings for use in soft X-ray projection lithography optical systems. Techniques used to control and characterize coating uniformity on figured optics are described. Recent results are presented.

Descriptors :   *LITHOGRAPHY, *OPTICS, COATINGS, CONTROL, REFLECTANCE, SOFT X RAYS, X RAYS.

Subject Categories : Photography

Distribution Statement : APPROVED FOR PUBLIC RELEASE