Accession Number : ADP007251

Title :   Effect of Amplitude and Phase Dispersion on Images in Multilayer-Coated Soft-X-Ray Projection Systems,

Corporate Author : AT AND T BELL LABS MURRAY HILL NJ

Personal Author(s) : Jewell, Tanya E.

Report Date : 22 MAY 1992

Pagination or Media Count : 6

Abstract : The effect of reflectance variation and phase dispersion introduced by multilayer coatings on the image quality for different types of soft x-ray projection systems is investigated.

Descriptors :   COATINGS, DISPERSIONS, IMAGES, PHASE, QUALITY, REFLECTANCE, SOFT X RAYS, VARIATIONS, X RAYS, LITHOGRAPHY.

Subject Categories : Photography

Distribution Statement : APPROVED FOR PUBLIC RELEASE