Accession Number : ADP007251
Title : Effect of Amplitude and Phase Dispersion on Images in Multilayer-Coated Soft-X-Ray Projection Systems,
Corporate Author : AT AND T BELL LABS MURRAY HILL NJ
Personal Author(s) : Jewell, Tanya E.
Report Date : 22 MAY 1992
Pagination or Media Count : 6
Abstract : The effect of reflectance variation and phase dispersion introduced by multilayer coatings on the image quality for different types of soft x-ray projection systems is investigated.
Descriptors : COATINGS, DISPERSIONS, IMAGES, PHASE, QUALITY, REFLECTANCE, SOFT X RAYS, VARIATIONS, X RAYS, LITHOGRAPHY.
Subject Categories : Photography
Distribution Statement : APPROVED FOR PUBLIC RELEASE