Accession Number : ADP007256
Title : Nonspecular Scattering from X-Ray Multilayer Structures,
Corporate Author : CALIFORNIA UNIV BERKELEY LAWRENCE BERKELEY LAB
Personal Author(s) : Kortright, J. B.
Report Date : 22 MAY 1992
Pagination or Media Count : 5
Abstract : Measurements of non-specular x-ray scattering from a W/C multilayer structure are presented which demonstrate that in-plane heterogeneities exist in high quality multilayer structures on high quality substrates. Certain features of the non-specular scattering are presented and discussed. The implications of these observations for soft x-ray imaging using multilayer-coated focussing mirrors are discussed.
Descriptors : *LITHOGRAPHY, MEASUREMENT, MIRRORS, QUALITY, SCATTERING, SOFT X RAYS, STRUCTURES, SUBSTRATES, X RAY SCATTERING, X RAYS.
Subject Categories : Photography
Distribution Statement : APPROVED FOR PUBLIC RELEASE