Accession Number : ADP007256

Title :   Nonspecular Scattering from X-Ray Multilayer Structures,

Corporate Author : CALIFORNIA UNIV BERKELEY LAWRENCE BERKELEY LAB

Personal Author(s) : Kortright, J. B.

Report Date : 22 MAY 1992

Pagination or Media Count : 5

Abstract : Measurements of non-specular x-ray scattering from a W/C multilayer structure are presented which demonstrate that in-plane heterogeneities exist in high quality multilayer structures on high quality substrates. Certain features of the non-specular scattering are presented and discussed. The implications of these observations for soft x-ray imaging using multilayer-coated focussing mirrors are discussed.

Descriptors :   *LITHOGRAPHY, MEASUREMENT, MIRRORS, QUALITY, SCATTERING, SOFT X RAYS, STRUCTURES, SUBSTRATES, X RAY SCATTERING, X RAYS.

Subject Categories : Photography

Distribution Statement : APPROVED FOR PUBLIC RELEASE