Accession Number : ADP007257

Title :   National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,

Corporate Author : NATIONAL INST OF STANDARDS AND TECHNOLOGY GAITHERSBURG MD

Personal Author(s) : Watts, R. N. ; Ederer, D. L. ; Lucatorto, T. B. ; Isaacson, M.

Report Date : 22 MAY 1992

Pagination or Media Count : 3

Abstract : We describe the capabilities of the existing NIST soft X-ray reflectometry program and outline our proposed new characterization facility.

Descriptors :   *LITHOGRAPHY, FACILITIES, SOFT X RAYS, X RAYS, METROLOGY, STANDARDIZATION.

Subject Categories : Photography

Distribution Statement : APPROVED FOR PUBLIC RELEASE