Accession Number : ADP007379
Title : Large Arrays of Symmetric Self-Electro-Optic Effect Devices,
Corporate Author : AT AND T BELL LABS MURRAY HILL NJ
Personal Author(s) : Chirovsky, L. M. ; Focht, M. W. ; Freund, J. M. ; Guth, G. D. ; Leibenguth, R. E.
Report Date : 22 MAY 1992
Pagination or Media Count : 4
Abstract : We demonstrate 8 x 16 arrays of electrically addressed and 64 x 128 arrays and 128 x 256 arrays of optically addressed Symmetric SEEDs and discuss the performance of these devices. For optical processing to become a reality, large arrays of optical processing gates are required with low energies and fast switching speeds. Arrays of symmetric self electro-optic effect devices (S-SEEDs) with as many as 2048 devices (64 x 32) have been made using batch fabrication procedures that process an entire wafer of devices at once 1,2. In this paper we describe the extension of that work to arrays with 8192 devices (128 x 64) and 32768 elements (256 x 128). We also demonstrate 8 x 16 arrays of symmetric SEED modulators 3 with individual electrical access to the devices. The performance and uniformity of the arrays are more than acceptable to continue systems experiments with these types of devices.
Descriptors : *ELECTROOPTICS, *OPTICAL SWITCHING, ACCESS, ARRAYS, FABRICATION, OPTICAL PROCESSING, OPTICS, VELOCITY, WAFERS, LIGHT MODULATORS, INTEGRATED CIRCUITS, MONOLITHIC STRUCTURES(ELECTRONICS).
Subject Categories : Electrooptical and Optoelectronic Devices
Distribution Statement : APPROVED FOR PUBLIC RELEASE