Accession Number : ADP007753
Title : Characterization of Silicon Nitride Synthesized By Microwave Heating,
Corporate Author : OAK RIDGE NATIONAL LAB TN
Personal Author(s) : Kiggans, J. O. ; Hubbard, C. R. ; Steele, R. R. ; Kimrey, H. D.
Report Date : 27 APR 1992
Pagination or Media Count : 8
Abstract : Recently, a new procedure was developed for the nitridation of high purity silicon via microwave heating. Silicon samples were processed to various stages of nitridation utilizing microwave heating and then analyzed by X-ray diffraction and by scanning electron microscopy. These data were compared to that obtained from samples nitrided by conventional heating methods.
Descriptors : *MICROWAVES, *CERAMIC MATERIALS, *SILICON NITRIDES, *FIRING(CERAMICS), DIFFRACTION, ELECTRON MICROSCOPY, ELECTRONS, HEATING, MICROSCOPY, PURITY, SCANNING, SILICON, X RAY DIFFRACTION, X RAYS, HEATING, HIGH TEMPERATURE, SYMPOSIA.
Subject Categories : Ceramics, Refractories and Glass
Radiofrequency Wave Propagation
Distribution Statement : APPROVED FOR PUBLIC RELEASE