Accession Number : ADP007753

Title :   Characterization of Silicon Nitride Synthesized By Microwave Heating,

Corporate Author : OAK RIDGE NATIONAL LAB TN

Personal Author(s) : Kiggans, J. O. ; Hubbard, C. R. ; Steele, R. R. ; Kimrey, H. D.

Report Date : 27 APR 1992

Pagination or Media Count : 8

Abstract : Recently, a new procedure was developed for the nitridation of high purity silicon via microwave heating. Silicon samples were processed to various stages of nitridation utilizing microwave heating and then analyzed by X-ray diffraction and by scanning electron microscopy. These data were compared to that obtained from samples nitrided by conventional heating methods.

Descriptors :   *MICROWAVES, *CERAMIC MATERIALS, *SILICON NITRIDES, *FIRING(CERAMICS), DIFFRACTION, ELECTRON MICROSCOPY, ELECTRONS, HEATING, MICROSCOPY, PURITY, SCANNING, SILICON, X RAY DIFFRACTION, X RAYS, HEATING, HIGH TEMPERATURE, SYMPOSIA.

Subject Categories : Ceramics, Refractories and Glass
      Radiofrequency Wave Propagation

Distribution Statement : APPROVED FOR PUBLIC RELEASE