Accession Number : ADP007934

Title :   Scanning Scattering Microscope: A Novel Optical Technique for Imaging Surface Microtopography,

Corporate Author : NATIONAL INST OF STANDARDS AND TECHNOLOGY GAITHERSBURG MD

Personal Author(s) : Marton, Denes ; Fine, Joseph

Report Date : 22 MAY 1992

Pagination or Media Count : 3

Abstract : The Scanning Scattering Microscope (SSM) 1 can produce two-dimensional, high resolution micrographs of very small surface features and surface microtopography; this optical technique is very sensitive to surface roughness, surface and near-surface damage, and individual surface defects. Its present lateral resolution of about 5 um is augmented by an extremely high sensitivity to surface roughness of about 2 nm.

Descriptors :   *SCANNING ELECTRON MICROSCOPES, HIGH RESOLUTION, HIGH SENSITIVITY, RESOLUTION, ROUGHNESS, SCANNING, SENSITIVITY, SURFACE ROUGHNESS, SURFACES, ELECTRON SCATTERING.

Subject Categories : Test Facilities, Equipment and Methods

Distribution Statement : APPROVED FOR PUBLIC RELEASE