Accession Number : ADP007974
Title : Photoluminescence Mapping: New Technique to Characterize Materials and Structures for Fabrication of Photonic Devices,
Corporate Author : INSTITUTE OF ELECTRON TECHNOLOGY WARSAW (POLAND)
Personal Author(s) : Bugajski, Maciej ; Ornoch, Jacek
Report Date : JUL 1992
Pagination or Media Count : 4
Abstract : Since the fabrication of photonic devices is a complex and expensive process it is highly desirable to characterize both starting material and device structures after each step of technological Process. The ideal candidate which meets the production and research criteria is photoluminescence mapping technique. In this paper we describe apparatus for measuring photoluminescence over the entire wafer and discuss a number of applications of this technique.
Descriptors : *PHOTOLUMINESCENCE, *MAPPING, *SEMICONDUCTOR DEVICES, FABRICATION, MAPPING, MATERIALS, PHOTONICS, PRODUCTION, STRUCTURES, WAFERS.
Subject Categories : Electrooptical and Optoelectronic Devices
Solid State Physics
Distribution Statement : APPROVED FOR PUBLIC RELEASE