Accession Number : ADP007987

Title :   Focused-Ion-Beam Micromachining: A Fabrication Tool for Prototypal Semiconductor Lasers,

Corporate Author : OREGON GRADUATE INST BEAVERTON

Personal Author(s) : DeFreez, Richard K.

Report Date : JUL 1992

Pagination or Media Count : 4

Abstract : Focused-ion-beam micromachining is a technique for forming optical quality surfaces in semiconductor laser materials and has been used to fabricate several types of prototypal semiconductor laser structures. Diode laser output mirrors of quality comparable to that of cleaved facets have been fabricated. Focused-ion-beam micromachined (FIBM) single stripe coupled cavity lasers have demonstrated widely and continuously tunable single mode operation. Tunable single longitudinal mode optical power has been achieved with FIBM coupled cavity phase-locked arrays of AlGaAs semiconductor lasers. Hundreds of milliwatts of pulsed optical power has been observed from surface-emitting phase-locked arrays with FIBM turning and oscillator mirrors. The use of vector scanning of the ion beam to produce arbitrary surface contours, such as linear and curved turning mirrors and micron pitch gratings with various profiles, has been demonstrated.

Descriptors :   *SEMICONDUCTOR DEVICES, *MACHINING, ARRAYS, CAVITIES, CONTOURS, DIODES, ION BEAMS, LASER MATERIALS, MIRRORS, OPERATION, OSCILLATORS, OUTPUT, PHASE, POWER, PROFILES, QUALITY, SCANNING, SEMICONDUCTOR LASERS, SEMICONDUCTORS, STRIPES, SURFACES, TEMPERATURE.

Subject Categories : Mfg & Industrial Eng & Control of Product Sys
      Solid State Physics

Distribution Statement : APPROVED FOR PUBLIC RELEASE