Accession Number : ADP007991
Title : Electron-beam Writing System for Holographic Optical Elements,
Corporate Author : MATSUSHITA ELECTRIC INDUSTRIAL CO LTD MORIGUCHI OSAKA (JAPAN)
Personal Author(s) : Hori, Yoshikazu ; Sogawa, Fumihiro ; Kato, Makoto
Report Date : JUL 1992
Pagination or Media Count : 4
Abstract : A highly accurate and versatile electron-beam(EB) writing system suitable for fabrication of holographic optical elements (HOEs) with arbitrary patterns is developed. New HOEs with multiple functions are successfully fabricated by the EB system, and their unique applications are introduced.
Descriptors : *ELECTRON BEAMS, *FABRICATION, *HOLOGRAMS, FUNCTIONS, PATTERNS, WRITING, JAPAN.
Subject Categories : Mfg & Industrial Eng & Control of Product Sys
Distribution Statement : APPROVED FOR PUBLIC RELEASE