Accession Number : ADP007999

Title :   Open Tube Double Diffusion for the Fabrication of Bipolar Transistor Waveguide Optical Switch,

Corporate Author : TOKYO UNIV (JAPAN)

Personal Author(s) : Gautam, D. K. ; Nakano, Y. ; Tada, K.

Report Date : JUL 1992

Pagination or Media Count : 4

Abstract : Experimental results of a new method for the double diffusion into GaAs in an open tube have been presented. New techniques developed for the low concentration Zn diffusion at relatively higher values of the temperature and high concentration Sn diffusion in an open tube system can be convenient for the fabrication of bipolar transistor waveguide optical switches and other self-aligned bipolar devices needed for photonic integrated circuits.

Descriptors :   *BIPOLAR TRANSISTORS, *PHOTONICS, *OPTICAL SWITCHING, *OPTICAL WAVEGUIDES, DIFFUSION, FABRICATION, INTEGRATED CIRCUITS, TEMPERATURE, TUBES, VALUE, WAVEGUIDE SWITCHES.

Subject Categories : Electrooptical and Optoelectronic Devices

Distribution Statement : APPROVED FOR PUBLIC RELEASE