Accession Number : ADP008028

Title :   Study of Ultra-Thin Films in Multilayer Structures by Standing-Waves and Small-Angle X-Ray Scattering Techniques,

Corporate Author : AKADEMIYA NAUK SSSR MOSCOW

Personal Author(s) : Zheludeva, S.I. ; Kovalchuk, M.V. ; Novikova, N.N. ; Bashelhanov, I.V. ; Shubnikov, A.V.

Report Date : 05 MAR 1992

Pagination or Media Count : 4

Abstract : The traditional method for LSM parameters investigation uses small angle x-ray diffraction at Lambda = 0.lnm. The parameters of interest have been determined by comparing the theoretical angular dependencies of reflectivity as a function of these parameters with the experimental curves. In this paper we discuss the possibilities of solving the inverse problem, i.e. the electron density or permittivity distribution have been determined directly from the small angle x-ray diffraction spectra. Also new possibilities of ultrathin film thickness and density determination are demonstrated by means of x-ray method in form of x-ray standing wave technique (XSW) and total external fluorescence study (NTEF).

Descriptors :   *REFLECTIVITY, *X RAY DIFFRACTION, ANGLES, DENSITY, DETERMINATION, DISTRIBUTION, ELECTRON DENSITY, EXTERNAL, FILMS, FLUORESCENCE, FUNCTIONS, PARAMETERS, SPECTRA, STANDING WAVES, THICKNESS, X RAYS, LOW ANGLES, THIN FILMS, USSR.

Subject Categories : Nuclear Physics & Elementary Particle Physics
      Optics

Distribution Statement : APPROVED FOR PUBLIC RELEASE