Accession Number : ADP008055
Title : Preparation and Characterization of Platinum-Carbon Multilayers,
Corporate Author : NIKON CORP TOKYO (JAPAN)
Personal Author(s) : Yamashita, K. ; Lodha, G.S. ; Suzuki, T. ; Hatsukade, I. ; Ohtani, M.
Report Date : 05 MAR 1992
Pagination or Media Count : 3
Abstract : Development of platinum-carbon(Pt/C) multilayers is aimed at applying to grazing incidence x-ray optical systems such as x-ray telescope, x-ray microscope and x-ray beamline optics of synchrotron radiation. Pt/C multilayers were synthesized on a float glass, silicon wafer and laminar grating by an electron beam deposition method. The thickness(2d) and number(N) of layer pairs are 50-150A and 525, respectively. The thickness ratio of Pt to C was 1/2 and 1/1. The temperature of substrates during the deposition was controlled at liquid nitrogen(LN2), room-temperature or 100 deg C. The x-ray reflectivity measurement was carried out in the energy range 0.9-8keV by using characteristic x-rays of Cu-K a and Al-Ka and monochromatized synchrotron radiation at UVSOR, Institute for Molecular Science. A thin window proportional counter was used for all these measurements. The detailed description of reflectivity measurement system is given by Yamashita et all.
Descriptors : *CARBON, *LAYERS, *OPTICS, *PLATINUM, *REFLECTIVITY, *X RAYS, COUNTERS, DEPOSITION, ELECTRON BEAMS, ELECTRONS, ENERGY, EQUATIONS, FLOATS, GLASS, GRAZING, LIQUID NITROGEN, LIQUIDS, MEASUREMENT, MICROSCOPES, NITROGEN, NUMBERS, PROPORTIONAL COUNTERS, RADIATION, RATIOS, ROOM TEMPERATURE, SILICON, SUBSTRATES, SYNCHROTRON RADIATION, SYNCHROTRONS, TELESCOPES, TEMPERATURE, THICKNESS, WAFERS, WINDOWS, ANGLE OF INCIDENCE, GRATINGS(SPECTRA).
Subject Categories : Metallurgy and Metallography
Atomic and Molecular Physics and Spectroscopy
Distribution Statement : APPROVED FOR PUBLIC RELEASE